Handbook of plasma processing technology: fundamentals, etching, deposition, and surface interactions
Stephen M. Rossnagel, William D. Westwood, Jerome J. Haber
This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.
వర్గాలు:
సంవత్సరం:
1990
ప్రచురణకర్త:
Noyes Publications
భాష:
english
పేజీల సంఖ్య:
535
ISBN 10:
0815517637
ISBN 13:
9780815517634
పుస్తక శ్రేణి:
Materials science and process technology series
ఫైల్:
DJVU, 4.98 MB
IPFS:
,
english, 1990